Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657207 | Charged-particle-beam microlithography apparatus and methods including optical corrections made during subfield exposures | Shintaro Kawata, Teruaki Okino, Noriyuki Hirayanagi | 2003-12-02 |
| 6621089 | Reticle-focus detector, and charged-particle-beam microlithography apparatus and methods comprising same | — | 2003-09-16 |
| 6618119 | Projection exposure method and apparatus | — | 2003-09-09 |
| 6608665 | Scanning exposure apparatus having adjustable illumination area and methods related thereto | Kenji Nishi | 2003-08-19 |
| 6590218 | Projection-exposure methods and apparatus exhibiting increased throughput | — | 2003-07-08 |
| 6585165 | IC card having a mica capacitor | Nobukazu Kuroda | 2003-07-01 |
| 6573515 | Charged-particle-beam projection-exposure apparatus and methods exhibiting improved alignment and registration of projected pattern portions | — | 2003-06-03 |
| 6572022 | Information recording tag | — | 2003-06-03 |
| 6518887 | Information recording tag | Takashi Matsumura | 2003-02-11 |