Issued Patents 2003
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667796 | Exposure method and apparatus | — | 2003-12-23 |
| 6654097 | Projection exposure apparatus | — | 2003-11-25 |
| 6654095 | Exposure apparatus, exposure method, and device manufacturing method | — | 2003-11-25 |
| 6653025 | Mask producing method | — | 2003-11-25 |
| RE38320 | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system | Kazuo Ushida, Seiro Murakami, Tohru Kiuchi, Yasuaki Tanaka | 2003-11-18 |
| 6624433 | Method and apparatus for positioning substrate and the like | Masahiko Okumura | 2003-09-23 |
| 6608665 | Scanning exposure apparatus having adjustable illumination area and methods related thereto | Kazuaki Suzuki | 2003-08-19 |
| 6608681 | Exposure method and apparatus | Yasuaki Tanaka, Seiro Murakami | 2003-08-19 |
| 6597430 | Exposure method, illuminating device, and exposure system | Osamu Tanitsu, Kyoji Nakamura | 2003-07-22 |
| 6590634 | Exposure apparatus and method | Kazuya Ota | 2003-07-08 |
| 6590633 | Stage apparatus and method for producing circuit device utilizing the same | Toru Kiuchi | 2003-07-08 |
| 6590636 | Projection exposure method and apparatus | — | 2003-07-08 |
| 6590637 | Exposure apparatus and method | — | 2003-07-08 |
| 6587201 | Aligning apparatus and method for aligning mask patterns with regions on a substrate | — | 2003-07-01 |
| 6577382 | Substrate transport apparatus and method | Yoshiki Kida | 2003-06-10 |
| 6563565 | Apparatus and method for projection exposure | — | 2003-05-13 |
| RE38113 | Method of driving mask stage and method of mask alignment | Seiro Murakami | 2003-05-06 |
| RE38085 | Exposure method and projection exposure apparatus | — | 2003-04-22 |
| 6549268 | Exposure method and apparatus | — | 2003-04-15 |
| 6549269 | Exposure apparatus and an exposure method | Kazuya Ota | 2003-04-15 |
| 6545746 | Projection exposure apparatus | — | 2003-04-08 |
| RE38038 | Exposure method and projection exposure apparatus | — | 2003-03-18 |
| 6522386 | Exposure apparatus having projection optical system with aberration correction element | — | 2003-02-18 |