Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE38320 | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system | Kenji Nishi, Kazuo Ushida, Tohru Kiuchi, Yasuaki Tanaka | 2003-11-18 |
| 6608681 | Exposure method and apparatus | Yasuaki Tanaka, Kenji Nishi | 2003-08-19 |
| RE38113 | Method of driving mask stage and method of mask alignment | Kenji Nishi | 2003-05-06 |