Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597430 | Exposure method, illuminating device, and exposure system | Kenji Nishi, Kyoji Nakamura | 2003-07-22 |
| 6563567 | Method and apparatus for illuminating a surface using a projection imaging apparatus | Hideki Komatsuda, Akihiko Goto, Nobumichi Kanayamaya, Masato Shibuya, Tetsuo Takahashi | 2003-05-13 |