Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665049 | Photomask, method for manufacturing the same, projection aligner using the photomask, and projection exposing method | — | 2003-12-16 |
| 6642994 | Optical exposure apparatus and photo-cleaning method | Takashi Mori, Hiroshi Nakamura, Yuji Kudo, Taro Ogata | 2003-11-04 |
| 6639732 | Projection exposure apparatus and method | Yasuhiro Omura, Masatoshi Ikeda, Shiwen Li | 2003-10-28 |
| 6621557 | Projection exposure apparatus and exposure methods | — | 2003-09-16 |
| 6583856 | Exposure apparatus and fabrication method of semiconductor device using the same | — | 2003-06-24 |
| 6563567 | Method and apparatus for illuminating a surface using a projection imaging apparatus | Hideki Komatsuda, Osamu Tanitsu, Akihiko Goto, Nobumichi Kanayamaya, Masato Shibuya | 2003-05-13 |