Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653840 | Ion current detecting device for internal combustion engine | Hiroshi Yorita, Makoto Toriyama, Tohru Yoshinaga | 2003-11-25 |
| 6639732 | Projection exposure apparatus and method | Yasuhiro Omura, Tetsuo Takahashi, Shiwen Li | 2003-10-28 |
| 6557537 | Ion current detection system and method for internal combustion engine | Hiroshi Yorita, Makoto Toriyama | 2003-05-06 |
| 6529264 | Support structure for a projection exposure apparatus and projection exposure apparatus having the same | — | 2003-03-04 |