Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665051 | Illumination system and exposure apparatus and method | — | 2003-12-16 |
| 6661499 | Projection exposure apparatus with a catadioptric projection optical system | Yasuhiro Omura, Toshihiko Ozawa, Takashi Mori | 2003-12-09 |
| 6590959 | High-intensity sources of short-wavelength electromagnetic radiation for microlithography and other uses | Noriaki Kandaka | 2003-07-08 |
| 6563567 | Method and apparatus for illuminating a surface using a projection imaging apparatus | Osamu Tanitsu, Akihiko Goto, Nobumichi Kanayamaya, Masato Shibuya, Tetsuo Takahashi | 2003-05-13 |
| 6526118 | Projection exposure apparatus and method, and illumination optical system thereof | Takashi Mori | 2003-02-25 |