Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660642 | Toxic residual gas removal by non-reactive ion sputtering | Zou Zheng, Zhou Mei Sheng, Paul Proctor | 2003-12-09 |
| 6632745 | Method of forming almost L-shaped spacer for improved ILD gap fill | Chiew Wah Yap, Zheng Zou, Eng Hua Lim, Nguyen Lac, Manni Lal | 2003-10-14 |
| 6566208 | Method to form elevated source/drain using poly spacer | Yang Pan, Lee Yong Meng, Leung Keung, Jia Zhen Zheng, Lap Chan +2 more | 2003-05-20 |
| 6544824 | Method to form a vertical transistor by first forming a gate/spacer stack, then using selective epitaxy to form source, drain and channel | Jia Zhen Zheng, Lap Chan, Elgin Quek, Ravi Sundaresan, Yang Pan +2 more | 2003-04-08 |
| 6541327 | Method to form self-aligned source/drain CMOS device on insulated staircase oxide | Lap Chan, Elgin Quek, Ravi Sundaresan, Yang Pan, James Yong Meng Lee +2 more | 2003-04-01 |
| 6511884 | Method to form and/or isolate vertical transistors | Elgin Quek, Ravi Sundaresan, Yang Pan, Yong Meng Lee, Ying-Keung Leung +2 more | 2003-01-28 |