Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663472 | Multiple step CMP polishing | Victor Lim, Chen Feng, Subramanian Balakumar | 2003-12-16 |
| 6664190 | Pre STI-CMP planarization scheme | Feng Chen, Cheng-Hou Loh | 2003-12-16 |
| 6660642 | Toxic residual gas removal by non-reactive ion sputtering | Zou Zheng, Zhou Mei Sheng, Yelehanka Ramachandramurthy Pradeep | 2003-12-09 |