Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663472 | Multiple step CMP polishing | Victor Lim, Chen Feng, Paul Proctor | 2003-12-16 |
| 6649486 | Method to form shallow trench isolations | Kong Hean Lee, Zheng Zhou, Xian Bin Wang | 2003-11-18 |
| 6569770 | Method for improving oxide erosion of tungsten CMP operations | Xian Bin Wang, Yi Xu, Cuiyang Wang | 2003-05-27 |