Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649486 | Method to form shallow trench isolations | Subramanian Balakumar, Kong Hean Lee, Zheng Zhou | 2003-11-18 |
| 6569770 | Method for improving oxide erosion of tungsten CMP operations | Yi Xu, Subramanian Balakumar, Cuiyang Wang | 2003-05-27 |