Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649486 | Method to form shallow trench isolations | Subramanian Balakumar, Zheng Zhou, Xian Bin Wang | 2003-11-18 |
| 6613648 | Shallow trench isolation using TEOS cap and polysilicon pullback | Seng-Keong Victor Lim, Feng Chen, Wang Ling Goh | 2003-09-02 |