Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613648 | Shallow trench isolation using TEOS cap and polysilicon pullback | Feng Chen, Kong Hean Lee, Wang Ling Goh | 2003-09-02 |
| 6613649 | Method for buffer STI scheme with a hard mask layer as an oxidation barrier | Feng Chen, Alex See, Wang Ling Goh | 2003-09-02 |