Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660642 | Toxic residual gas removal by non-reactive ion sputtering | Zou Zheng, Yelehanka Ramachandramurthy Pradeep, Paul Proctor | 2003-12-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660642 | Toxic residual gas removal by non-reactive ion sputtering | Zou Zheng, Yelehanka Ramachandramurthy Pradeep, Paul Proctor | 2003-12-09 |