Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544824 | Method to form a vertical transistor by first forming a gate/spacer stack, then using selective epitaxy to form source, drain and channel | Yelehanka Ramachandramurthy Pradeep, Jia Zhen Zheng, Lap Chan, Elgin Quek, Yang Pan +2 more | 2003-04-08 |
| 6541327 | Method to form self-aligned source/drain CMOS device on insulated staircase oxide | Lap Chan, Elgin Quek, Yang Pan, James Yong Meng Lee, Ying-Keung Leung +2 more | 2003-04-01 |
| 6511884 | Method to form and/or isolate vertical transistors | Elgin Quek, Yang Pan, Yong Meng Lee, Ying-Keung Leung, Yelehanka Ramachandramurthy Pradeep +2 more | 2003-01-28 |