Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632745 | Method of forming almost L-shaped spacer for improved ILD gap fill | Zheng Zou, Eng Hua Lim, Nguyen Lac, Yelehanka Ramachandramurthy Pradeep, Manni Lal | 2003-10-14 |
| 6521539 | Selective etch method for selectively etching a multi-layer stack layer | Mei Sheng Zhou, Xue Chun Dai | 2003-02-18 |