Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614505 | Lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev | 2003-09-02 |
| 6597431 | Lithographic projection apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +1 more | 2003-07-22 |
| 6576912 | Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window | Hugo Matthieu Visser, Richard L. Sandstrom, Theodorus Hubertus Josephus Bisschops, Jeroen Jonkers | 2003-06-10 |