Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630984 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2003-10-07 |
| 6618122 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-09-09 |
| 6603130 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses | Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-08-05 |
| 6597433 | Multi-stage drive arrangements and their application in lithographic projection apparatuses | Michael J. M. Renkens, Adrianus G. Bouwer, Johannes C. Driessen, Hermanus M. J. R. Soemers, Jakob Vijfvinkel | 2003-07-22 |
| 6576912 | Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window | Hugo Matthieu Visser, Richard L. Sandstrom, Vadim Yevgenyevich Banine, Jeroen Jonkers | 2003-06-10 |
| 6545377 | Coil with cooling means | — | 2003-04-08 |
| 6538257 | Method of generating extremely short-wave radiation, and extremely short-wave radiation source unit | — | 2003-03-25 |