Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576912 | Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window | Richard L. Sandstrom, Theodorus Hubertus Josephus Bisschops, Vadim Yevgenyevich Banine, Jeroen Jonkers | 2003-06-10 |