Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6618122 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-09-09 |
| 6603130 | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2003-08-05 |
| 6597429 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Eric W. A. Janssen, Marcel J. M. Renkens, Ronald Maarten Schneider, Theo H. J. Bisschops, Rob Tabor | 2003-07-22 |
| 6597433 | Multi-stage drive arrangements and their application in lithographic projection apparatuses | Michael J. M. Renkens, Adrianus G. Bouwer, Johannes C. Driessen, Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers | 2003-07-22 |