Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614505 | Lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2003-09-02 |