Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667484 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop | 2003-12-23 |
| 6614505 | Lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2003-09-02 |