Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667484 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov | 2003-12-23 |
| 6656575 | Multilayer system with protecting layer system and production method | Eric Louis, Andrey E. Yakshin, Peter Gorts, Sebastian Oestreich | 2003-12-02 |