Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597431 | Lithographic projection apparatus and device manufacturing method | Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2003-07-22 |
| 6512732 | Device for optically scanning information tracks on a plane using two subbeams | Martinus P. M. Bierhoff, Antonius Hermanus Maria Akkermans, Peter Coops | 2003-01-28 |