Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597431 | Lithographic projection apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2003-07-22 |
| 6593585 | Lithographic projection apparatus with positioning system for use with reflectors | Antonius Johannes Josephus Van Dijsseldonk | 2003-07-15 |
| 6555834 | Gas flushing system for use in lithographic apparatus | — | 2003-04-29 |
| 6542220 | Purge gas systems for use in lithographic projection apparatus | Raymond Laurentius Johannes Schrijver, Tjarko Adriaan Rudolf Van Empel, Marcel Koenraad Marie Baggen, Bernardus Antonius Johannes Luttikhuis, Yim-Bun Patrick Kwan | 2003-04-01 |
| 6509951 | Lithographic projection apparatus having a temperature controlled heat shield | Yim-Bun Patrick Kwan, Marcel Johannus Elisabeth Hubertus Muitjens, Sonja T. De Vrieze-Voorn | 2003-01-21 |