Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671036 | Balanced positioning system for use in lithographic apparatus | — | 2003-12-30 |
| 6657204 | Cooling of voice coil motors in lithographic projection apparatus | Edwin Johan Buis, Noud Jan Gilissen, Paulus Schapendonk | 2003-12-02 |
| 6635887 | Positioning system for use in lithographic apparatus | Serge Wetzels, Gerjan P. Veldhuis | 2003-10-21 |
| 6542220 | Purge gas systems for use in lithographic projection apparatus | Raymond Laurentius Johannes Schrijver, Tjarko Adriaan Rudolf Van Empel, Marcel Koenraad Marie Baggen, Bernardus Antonius Johannes Luttikhuis, Erik Roelof Loopstra | 2003-04-01 |
| 6525803 | Balanced positioning system for use in lithographic apparatus | Wilhelmus J. T. P. van de Wiel | 2003-02-25 |
| 6509951 | Lithographic projection apparatus having a temperature controlled heat shield | Erik Roelof Loopstra, Marcel Johannus Elisabeth Hubertus Muitjens, Sonja T. De Vrieze-Voorn | 2003-01-21 |