Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509951 | Lithographic projection apparatus having a temperature controlled heat shield | Erik Roelof Loopstra, Yim-Bun Patrick Kwan, Sonja T. De Vrieze-Voorn | 2003-01-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6509951 | Lithographic projection apparatus having a temperature controlled heat shield | Erik Roelof Loopstra, Yim-Bun Patrick Kwan, Sonja T. De Vrieze-Voorn | 2003-01-21 |