Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657204 | Cooling of voice coil motors in lithographic projection apparatus | Edwin Johan Buis, Noud Jan Gilissen, Yim-Bun Patrick Kwan | 2003-12-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657204 | Cooling of voice coil motors in lithographic projection apparatus | Edwin Johan Buis, Noud Jan Gilissen, Yim-Bun Patrick Kwan | 2003-12-02 |