Issued Patents 2003
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521524 | Via filled dual damascene structure with middle stop layer and method for making the same | Fei Wang, Lynne A. Okada, Calvin T. Gabriel | 2003-02-18 |
| 6513996 | Integrated equipment to drain water-hexane developer for pattern collapse | Michael K. Templeton, Bhanwar Singh | 2003-02-04 |
| 6510730 | System and method for facilitating selection of optimized optical proximity correction | Khoi A. Phan, Bhanwar Singh | 2003-01-28 |
| 6509229 | Method for forming self-aligned contacts using consumable spacers | Fei Wang, Yu Sun | 2003-01-21 |
| 6507474 | Using localized ionizer to reduce electrostatic charge from wafer and mask | Bhanwar Singh, Khoi A. Phan, Bryan K. Choo, Bharath Rangarajan | 2003-01-14 |