Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645868 | Method of forming shallow trench isolation using antireflection layer | Carl P. Babcock | 2003-11-11 |
| 6605517 | Method for minimizing nitride residue on a silicon wafer | Krishnashree Achuthan, Angela T. Hui | 2003-08-12 |
| 6566230 | Shallow trench isolation spacer for weff improvement | Harpreet Sachar, Unsoon Kim, Mark S. Chang, Chih-Yuh Yang | 2003-05-20 |