Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660459 | System and method for developing a photoresist layer with reduced pattern collapse | — | 2003-12-09 |
| 6645868 | Method of forming shallow trench isolation using antireflection layer | Jayendra D. Bhakta | 2003-11-11 |
| 6630404 | Reducing feature dimension using self-assembled monolayer | — | 2003-10-07 |
| 6576536 | Ultra narrow lines for field effect transistors | — | 2003-06-10 |
| 6544699 | Method to improve accuracy of model-based optical proximity correction | Hung-Eil Kim | 2003-04-08 |