Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593039 | Photoresist mask that combines attenuated and alternating phase shifting masks | — | 2003-07-15 |
| 6581023 | Accurate contact critical dimension measurement using variable threshold method | — | 2003-06-17 |
| 6576376 | Tri-tone mask process for dense and isolated patterns | — | 2003-06-10 |
| 6566020 | Dark field trench in an alternating phase shift mask to avoid phase conflict | — | 2003-05-20 |
| 6544699 | Method to improve accuracy of model-based optical proximity correction | Carl P. Babcock | 2003-04-08 |