Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450190 | Method of detecting abnormalities in flow rate in pressure-type flow controller | Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Kazuo Fukasawa +6 more | 2002-09-17 |
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2002-07-23 |
| 6394415 | Fluid control valve and fluid supply/exhaust system | Tadahiro Ohmi, Migaku Takahashi, Michio Yamaji, Tsuyoshi Tanikawa, Nobukazu Ikeda +5 more | 2002-05-28 |