Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450190 | Method of detecting abnormalities in flow rate in pressure-type flow controller | Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Kazuo Fukasawa, Hiroshi Koizumi +6 more | 2002-09-17 |
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2002-07-23 |
| D459254 | Multi-chamber processing apparatus | Eiji Hirose, Jun Ozawa, Takaaki Hirooka | 2002-06-25 |