Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450190 | Method of detecting abnormalities in flow rate in pressure-type flow controller | Tadahiro Ohmi, Seiichi Iida, Jun Hirose, Kazuo Fukasawa, Hiroshi Koizumi +6 more | 2002-09-17 |
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino, Ryousuke Dohi +13 more | 2002-07-23 |