Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Kouji Nishino, Ryousuke Dohi +13 more | 2002-07-23 |
| 6408879 | Fluid control device | Tadahiro Ohmi, Akihiro Morimoto, Nobukazu Ikeda, Keiji Hirao, Takashi Hirose +2 more | 2002-06-25 |
| 6387158 | Method of removing moisture in gas supply system | Nobukazu Ikeda, Akihiro Morimoto, Teruo Honiden, Kouji Kawada, Katunori Komehana +2 more | 2002-05-14 |
| 6334962 | Low flow rate moisture supply process | Koji Kawada, Yoshikazu Tanabe, Nobukazu Ikeda, Akihiro Morimoto | 2002-01-01 |