Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450190 | Method of detecting abnormalities in flow rate in pressure-type flow controller | Tadahiro Ohmi, Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Kazuo Fukasawa +6 more | 2002-09-17 |
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2002-07-23 |
| 6408879 | Fluid control device | Tadahiro Ohmi, Yukio Minami, Akihiro Morimoto, Keiji Hirao, Takashi Hirose +2 more | 2002-06-25 |
| 6394415 | Fluid control valve and fluid supply/exhaust system | Tadahiro Ohmi, Migaku Takahashi, Michio Yamaji, Tsuyoshi Tanikawa, Ryosuke Dohi +5 more | 2002-05-28 |
| 6387158 | Method of removing moisture in gas supply system | Akihiro Morimoto, Yukio Minami, Teruo Honiden, Kouji Kawada, Katunori Komehana +2 more | 2002-05-14 |
| 6360762 | Method for feeding gases for use in semiconductor manufacturing | Hirofumi Kitayama, Yoichi Kurono, Naoya Masuda | 2002-03-26 |
| 6334962 | Low flow rate moisture supply process | Yukio Minami, Koji Kawada, Yoshikazu Tanabe, Akihiro Morimoto | 2002-01-01 |