Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6422264 | Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus | Tadahiro Ohmi, Satoshi Kagatsume, Kazuhiko Sugiyama, Yukio Minami, Kouji Nishino +13 more | 2002-07-23 |
| 6408879 | Fluid control device | Tadahiro Ohmi, Yukio Minami, Akihiro Morimoto, Nobukazu Ikeda, Keiji Hirao +2 more | 2002-06-25 |
| 6394415 | Fluid control valve and fluid supply/exhaust system | Tadahiro Ohmi, Migaku Takahashi, Tsuyoshi Tanikawa, Nobukazu Ikeda, Ryosuke Dohi +5 more | 2002-05-28 |
| 6387158 | Method of removing moisture in gas supply system | Nobukazu Ikeda, Akihiro Morimoto, Yukio Minami, Teruo Honiden, Kouji Kawada +2 more | 2002-05-14 |
| 6382238 | Fluid control apparatus | Ken Ishii, Tsuneyuki Okabe, Yuji Kawano | 2002-05-07 |
| 6378192 | Method of fixing a plurality of lower members each having reference bore for installing upper member, and fixing jigs | Tadahiro Ohmi, Tsutomu Shinohara | 2002-04-30 |
| 6361081 | Device for fixing lower members and fluid control apparatus incorporating same | Kosuke Yokoyama, Tsutomu Shinohara, Shigeru Itoi, Tetsuya Kojima | 2002-03-26 |