Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485602 | Plasma processing apparatus | — | 2002-11-26 |
| D459254 | Multi-chamber processing apparatus | Jun Hirose, Jun Ozawa, Takaaki Hirooka | 2002-06-25 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485602 | Plasma processing apparatus | — | 2002-11-26 |
| D459254 | Multi-chamber processing apparatus | Jun Hirose, Jun Ozawa, Takaaki Hirooka | 2002-06-25 |