Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483173 | Solution to black diamond film delamination problem | Lain-Jong Li, Syun-Ming Jang | 2002-11-19 |
| 6457477 | Method of cleaning a copper/porous low-k dual damascene etch | Bao-Ru Young, Li-Chih Chao, Chi-Shiung Tsai | 2002-10-01 |
| 6451701 | Method for making low-resistance silicide contacts between closely spaced electrically conducting lines for field effect transistors | Mei-Yun Wang, Shau-Lin Shue | 2002-09-17 |
| 6358839 | Solution to black diamond film delamination problem | Lain-Jong Li, Syun-Ming Jang | 2002-03-19 |