Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491042 | Post etching treatment process for high density oxide etcher | Chia-Shiung Tsai | 2002-12-10 |
| 6457477 | Method of cleaning a copper/porous low-k dual damascene etch | Li-Chih Chao, Shwangming Jeng, Chi-Shiung Tsai | 2002-10-01 |
| 6436851 | Method for spin coating a high viscosity liquid on a wafer | Kun-I Lee, Der-Fang Huang | 2002-08-20 |