Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6457477 | Method of cleaning a copper/porous low-k dual damascene etch | Bao-Ru Young, Li-Chih Chao, Shwangming Jeng | 2002-10-01 |
CT
Chi-Shiung Tsai
Overall (2002): #239,933 of 266,432Top 95%
1
Patents 2002