Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451701 | Method for making low-resistance silicide contacts between closely spaced electrically conducting lines for field effect transistors | Shwangming Jeng, Shau-Lin Shue | 2002-09-17 |
| 6358844 | Tungsten deposition process with dual-step nucleation | Shau-Lin Shue | 2002-03-19 |