Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483173 | Solution to black diamond film delamination problem | Shwangming Jeng, Syun-Ming Jang | 2002-11-19 |
| 6407013 | Soft plasma oxidizing plasma method for forming carbon doped silicon containing dielectric layer with enhanced adhesive properties | Tien-I Bao, Cheng-Chung Lin, Syun-Ming Jang | 2002-06-18 |
| 6372661 | Method to improve the crack resistance of CVD low-k dielectric constant material | Cheng-Chung Lin, Shwang-Ming Jeng | 2002-04-16 |
| 6358839 | Solution to black diamond film delamination problem | Shwangming Jeng, Syun-Ming Jang | 2002-03-19 |