Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444566 | Method of making borderless contact having a sion buffer layer | Jyh-Huei Chen, Chu-Yun Fu, Hun-Jan Tao | 2002-09-03 |
| 6436841 | Selectivity oxide-to-oxynitride etch process using a fluorine containing gas, an inert gas and a weak oxidant | Bao-Ching Pen, Mei-Ru Kuo, Hun-Jan Tao | 2002-08-20 |
| 6410424 | Process flow to optimize profile of ultra small size photo resist free contact | Chung-Long Chang, Chii-Ming Wu, Hun-Jan Tao | 2002-06-25 |
| 6407002 | Partial resist free approach in contact etch to improve W-filling | Li-Te Lin, Yuan-Hung Chiu, Hun-Jan Tao | 2002-06-18 |
| 6399437 | Enhanced side-wall stacked capacitor | Yung-Yi Hsu, Yi Yi, Chia-Shun Hsiao | 2002-06-04 |
| 6368974 | Shrinking equal effect critical dimension of mask by in situ polymer deposition and etching | Chan-Lon Yang | 2002-04-09 |