Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465294 | Self-aligned process for a stacked gate RF MOSFET device | Chaochieh Tsai, Ju-Yu Chang, Shyh-Chyi Wong | 2002-10-15 |
| 6444371 | Prevention of die loss to chemical mechanical polishing | Syun-Ming Jang, Jui-Yu Chang, Chen-Hua Yu, Tsu Shih, Jeng-Horng Chen | 2002-09-03 |
| 6410424 | Process flow to optimize profile of ultra small size photo resist free contact | Ming-Huan Tsai, Chii-Ming Wu, Hun-Jan Tao | 2002-06-25 |
| 6391792 | Multi-step chemical mechanical polish (CMP) planarizing method for forming patterned planarized aperture fill layer | Syun-Ming Jang, Juing-Yi Cheng | 2002-05-21 |
| 6350693 | Method of CMP of polysilicon | Syun-Ming Jang | 2002-02-26 |