Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436841 | Selectivity oxide-to-oxynitride etch process using a fluorine containing gas, an inert gas and a weak oxidant | Ming-Huan Tsai, Mei-Ru Kuo, Hun-Jan Tao | 2002-08-20 |
BP
Bao-Ching Pen
Overall (2002): #80,451 of 266,432Top 35%
1
Patents 2002