Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440875 | Masking layer method for forming a spacer layer with enhanced linewidth control | Bor-Wen Chan | 2002-08-27 |
| 6436841 | Selectivity oxide-to-oxynitride etch process using a fluorine containing gas, an inert gas and a weak oxidant | Ming-Huan Tsai, Bao-Ching Pen, Hun-Jan Tao | 2002-08-20 |