Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440875 | Masking layer method for forming a spacer layer with enhanced linewidth control | Mei-Ru Kuo | 2002-08-27 |
| 6399286 | Method of fabricating reduced critical dimension for conductive line and space | Yuan-Hung Liu | 2002-06-04 |
| 6352919 | Method of fabricating a borderless via | Yeur-Luen Tu, Yuan-Hung Liu | 2002-03-05 |