Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492245 | Method of forming air gap isolation between a bit line contact structure and a capacitor under bit line structure | Yeur-Luen Tu | 2002-12-10 |
| 6486025 | Methods for forming memory cell structures | Yeur-Luen Tu, Chia-Shiung Tsai, Min-hwa Chi, Chih-Hsing Yu | 2002-11-26 |
| 6399286 | Method of fabricating reduced critical dimension for conductive line and space | Bor-Wen Chan | 2002-06-04 |
| 6352919 | Method of fabricating a borderless via | Yeur-Luen Tu, Bor-Wen Chan | 2002-03-05 |